Electrothermally Actuated RF MEMS Switches Suspended on a Low-Resistivity Substrate
نویسندگان
چکیده
منابع مشابه
RF MEMS Switches
An overview of the MEMS technology development and applications is given in this paper. A special attention is paid to the RF MEMS switches. Both series and shunt MEMS switches have been considered. It is also presented a technique for modeling and design of inductively-tuned MEMS shunt switch. Some very important issues for the device maturity e.g. reliability and packaging have been addressed.
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2007
ISSN: 1057-7157
DOI: 10.1109/jmems.2007.904744